000 00555pam a2200193 a 4500
001 516907
005 20220609144459.0
008 860812s1986 enka 001 0 eng
020 _a9780904357820 (pbk.)
040 _aDLC
_cDLC
_dDLC
082 0 0 _a621.3871 GRO
100 _aGrovenor, C.R.M.
245 0 0 _aMaterials for semiconductor devices /
_cC.R.M.Grovenor
260 _aLondon
_bThe Institute of Metals
_c1987
300 _a165 p.
_c22 cm.
500 _aGratis Lalitha Janakiraman
650 0 _aSemiconductors
_xPatents.
942 _2ddc
_cBK
999 _c114266
_d114266